Planarizing and polishing spin coated polyimide
Spin-on Polyimide Surfaces Without Defects
Spin coated polyimide may be planarized and polished to give a defect free surface for improved lithography processing.
Polyimide coatings applications:
There are many benefits from using planarized polyimide coatings. By planarizing polyimide coatings, applied as liquid onto a substrate by:
the surface will be polished to a near defect free level for better functioning as a dielectric and will provide improved yield in polyimide patterning applications.
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Updated: 14 June 2012