Spin-on Polyimide Surfaces Without Defects

Spin coated polyimide may be planarized and polished to give a defect free surface for improved litography processing.

Polyimide coatings applications:

There are many benefits from using planarized polyimide coatings. By planarizing polyimide coatings, applied as liquid onto a substrate by:

the surface will be polished to a near defect free level for better functioning as a dielectric and will provide improved yield in polyimide patterning applications.


Return to Home Page: Polyimide applications and properties

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